Introduction to Microelectromechanical Systems
ENG-SCI 276
Subject & Catalog Number
Course Information
Description
The goal of this multidisciplinary course is to enable students to learn how to create miniaturized devices. In addition to the weekly lectures, hand-on activities will lead students to become capable of creating micro-nano devices. Students will understand the physics of sensors and actuators, become familiar with thin-film fabrication technologies, and understanding how these concepts were commercialized. Learning is in small teams – together, students design, simulate, build, edit, discuss, and critique their work. Students will make basic structures using lithography, deposition, and etching. Next, they integrate such structures to create, testable, devices. At the end of the semester, they reverse-engineer some commercial devices and reflect on their fabrication and function.
Course Notes
ES 176 is also offered as ES 276. Students may not take both for credit. Students who enroll in ES 176 will learn similar content as students who enroll in ES 276 but may have fewer demanding experiments. Course includes an active learning component of labs and simulations, usually on Thursdays. Students will also use CNS on per demand bases.
Recommended Prep
Applied Physics 50a,b, Physical Sciences 12a,b, or 15a,b; College Chemistry at the level of Life Sciences 1a, Physical Sciences 1, Engineering Sciences 173 and Engineering Sciences 176.
Available for Harvard Cross Registration
NOTE: This course requires additional sections; you will be prompted to choose secondary components during the Add to Cart process
